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Modularized low temperature LNO/PZT/LNO ferroelectric capacitor-over-interconnect (COI) FeRAM for advanced SOC (ASOC) application.
S. L. Lung
Dennis Lin
S. S. Chen
Gary Weng
C. L. Liu
S. C. Lai
C. W. Tsai
T. B. Wu
Rich Liu
Published in:
CICC (2002)
Keyphrases
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