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A case study on modeling and optimizing photolithography stage of semiconductor fabrication process.

Hyun-Jin KimKwang-Jae KimDoh-Soon Kwak
Published in: Qual. Reliab. Eng. Int. (2010)
Keyphrases
  • integrated circuit
  • multiscale
  • high speed
  • real time
  • artificial intelligence
  • development process
  • modeling method
  • final stage