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MEMS packaging reliability assessment: Residual Gas Analysis of gaseous species trapped inside MEMS cavities.
Pierre-Louis Charvet
P. Nicolas
D. Bloch
B. Savornin
Published in:
Microelectron. Reliab. (2013)
Keyphrases
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reliability assessment
data sets
real time
neural network
genetic algorithm
clustering algorithm
image analysis
databases
machine learning
learning algorithm
search engine
knowledge base
data analysis
high speed
quantitative analysis