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Plasma Charging Damage Reduction in IC Processing by A Self-balancing Interconnect.
Zhichun Wang
Jan Ackaert
Cora Salm
Fred G. Kuper
Eddy De Backer
Published in:
Microelectron. Reliab. (2004)
Keyphrases
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data mining
data processing
information processing
integrated circuit
efficient processing
reduction method
neural network
machine learning
information retrieval
artificial intelligence
computer vision
high speed
damage assessment
damage detection
scanning electron microscope