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10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization.
Jeong Nyeon Kim
Tianning Liu
Thomas N. Jackson
Kyusun Choi
Susan Trolier-McKinstry
Richard L. Tutwiler
Judith A. Todd
Published in:
Sensors (2020)
Keyphrases
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finite element
thin film
boundary element
computer aided
multi layer
high density
finite element model
finite element analysis
finite element method
mesh generation
finite difference
material properties
gpu accelerated
biomechanical model