A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology.
Chi-Feng ChenChih-Hsiung ShenYun-Ying YehPublished in: Sensors (2021)
Keyphrases
- metal oxide semiconductor
- silicon on insulator
- low cost
- electronic devices
- cost effective
- high speed
- power consumption
- infrared
- cmos technology
- focal plane
- real time
- virtual instrument
- analog vlsi
- remote control
- desktop computers
- power supply
- circuit design
- technological advances
- integrated circuit
- rapid development
- personal computer