A Resonant Pressure Micro Sensor with a Stress Isolation Layer.
Yulan LuBo XieQiuxu WeiYadong LiXiaoqing ShiChao XiangDeyong ChenJunbo WangJian ChenPublished in: IEEE SENSORS (2018)
Keyphrases
- sensor networks
- sensor data
- multi layer
- shear stress
- real time
- imaging sensors
- sensor fusion
- sensor array
- sensor technology
- application layer
- multi sensor
- search engine
- electro mechanical systems
- control loop
- time of flight
- upper layer
- pulse width
- multiple layers
- single layer
- transfer function
- data acquisition
- artificial neural networks
- database systems
- data mining
- data sets