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Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater.
Mitsuteru Kimura
Fumitoshi Sakurai
Hirao Ohta
Tomoyuki Terada
Published in:
Microelectron. J. (2007)
Keyphrases
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sensor data
structural information
computer simulation
real time
multi sensor
room temperature
sensor networks
combining multiple
information systems
image sequences
high sensitivity
ultra high
thermal conductivity