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1×3 reconfigurable and simultaneous three-mode selective router based on silicon waveguide utilizing Ti microheaters as thermo-optic phase shifters.

Duong Quang DuyHai Ta DuyDuy Nguyen Thi HangThuy Tran Thi ThanhTuan Anh TranLinh Ho Duc TamNguyen Tan HungDang Hoai BacCao Dung Truong
Published in: Microelectron. J. (2021)
Keyphrases
  • waveguide
  • high density
  • phase shift
  • electro optic
  • low cost
  • high speed
  • antenna array
  • general purpose
  • end to end
  • high data rate
  • dielectric constant