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Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes.

Zhao XuChanghua HuJinwen Hu
Published in: Sci. China Inf. Sci. (2019)
Keyphrases
  • control method
  • kalman filtering
  • control strategy
  • diffusion processes
  • control system
  • kalman filter
  • control algorithm
  • multiscale
  • reinforcement learning
  • computational complexity
  • denoising
  • image restoration