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Thin Film Thickness Measurement by Surface Plasmon Resonance Using a Modified Otto's Configuration Combined with Ellipsometry.

Yasuhiro MizutaniTetsuo Iwata
Published in: Int. J. Autom. Technol. (2011)
Keyphrases
  • film thickness
  • thin film
  • refractive index
  • white light interferometry
  • room temperature
  • electrical properties
  • three dimensional
  • surface reconstruction
  • d objects
  • viewpoint
  • object surface