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Automatic defect classification for semiconductor manufacturing.

Paul B. ChouA. Ravishankar RaoMartin C. SturzenbeckerFrederick Y. WuVirginia H. Brecher
Published in: Mach. Vis. Appl. (1997)
Keyphrases
  • semiconductor manufacturing
  • defect classification
  • discrete event simulation
  • process control
  • fully automatic
  • semi automatic
  • database
  • data sets
  • databases
  • multiscale
  • expert systems
  • sufficient conditions