A real-time image processing algorithm for visual inspection of semiconductor wafer patterns.
Hiroshi SakouHaruo YodaMasakazu EjiriPublished in: Systems and Computers in Japan (1987)
Keyphrases
- visual inspection
- times faster
- learning algorithm
- real time image processing
- dynamic programming
- optimization algorithm
- detection algorithm
- computational cost
- optimal solution
- search space
- k means
- np hard
- experimental evaluation
- high accuracy
- real time
- segmentation algorithm
- expectation maximization
- particle swarm optimization
- computer vision
- case study
- image analysis
- matching algorithm
- probabilistic model
- feature selection
- pattern mining
- simulated annealing
- low cost
- cost function
- significant improvement
- similarity measure
- face recognition