A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography.
Siu-Kai ChoyNingning JiaChong-Sze TongMan-Lai TangEdmund Y. LamPublished in: SIAM J. Imaging Sci. (2012)
Keyphrases
- preprocessing
- improved algorithm
- parameter tuning
- detection algorithm
- optimization algorithm
- learning algorithm
- times faster
- theoretical analysis
- computationally efficient
- high accuracy
- experimental evaluation
- dynamic programming
- objective function
- computational complexity
- k means
- simulated annealing
- worst case
- cost function
- particle swarm optimization
- matching algorithm
- np hard
- convergence rate
- neural network
- significant improvement
- linear programming
- expectation maximization
- search space
- optimal solution
- similarity measure
- electron beam