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Ultrafast Source Mask Optimization via Conditional Discrete Diffusion.
Guojin Chen
Zixiao Wang
Bei Yu
David Z. Pan
Martin D. F. Wong
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2024)
Keyphrases
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continuous optimization
optimization problems
discrete optimization
optimization algorithm
optimization process
anisotropic diffusion
global optimization
evolution strategy
information technology
optimization method
optimization model
combinatorial optimization
database
multi objective
evolutionary algorithm
search algorithm
database systems
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