Ultrafast Source Mask Optimization via Conditional Discrete Diffusion.
Guojin ChenZixiao WangBei YuDavid Z. PanMartin D. F. WongPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2024)
Keyphrases
- continuous optimization
- optimization problems
- discrete optimization
- optimization algorithm
- optimization process
- anisotropic diffusion
- global optimization
- evolution strategy
- information technology
- optimization method
- optimization model
- combinatorial optimization
- database
- multi objective
- evolutionary algorithm
- search algorithm
- database systems
- knowledge base