Adaptive high precision control for piezo-actuated nano-positioner.
Toshikuni OzakiXinkai ChenPublished in: ISIC (2010)
Keyphrases
- high precision
- high recall
- adaptive control
- high reliability
- control system
- achieve high precision
- high accuracy
- control scheme
- nano scale
- force control
- adaptive neural
- open loop
- database
- control method
- control problems
- control theory
- vision system
- neural network
- adaptive learning
- closed loop
- process control
- steady state
- mobile robot
- case study
- artificial intelligence
- data sets