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Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices.

Donguk KimChan Bae JeongJung Dae KimKye-Sung LeeHwan HurKi-Hwan NamGeon-Hee KimKi Soo Chang
Published in: Sensors (2017)
Keyphrases
  • laser scanning
  • thermal imaging
  • visual inspection
  • volume reconstruction
  • infrared
  • three dimensional
  • high resolution
  • microscopy images
  • mobile devices
  • vein patterns
  • thin film
  • pattern recognition