Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS Infrared Sensor.
Pen-Sheng LinYijia WangMing-Ching ChengYu-Chen ChenYu-Cheng HuangWeileun FangPublished in: IEEE SENSORS (2020)
Keyphrases
- infrared
- focal plane
- multi sensor
- electro optical
- infrared images
- infrared sensors
- analog to digital converter
- time of flight
- image sensor
- high speed
- target detection and tracking
- target detection
- infrared imagery
- image enhancement
- hyperspectral
- plasma etching
- integrated circuit
- automatic target recognition
- imaging systems
- image processing
- thin film
- infrared video
- visible spectrum
- low power
- real time