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Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing.
Shu-Kai S. Fan
Chia-Yu Hsu
Du-Ming Tsai
Mabel C. Chou
Chih-Hung Jen
Jen-Hsuan Tsou
Published in:
IEEE Trans Autom. Sci. Eng. (2022)
Keyphrases
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semiconductor manufacturing
key features
discrete event simulation
process control
real time
monitoring system
data sets
production system
decision support
protein fold recognition
table tennis
computer vision
decision making
case study
image analysis
early warning