Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net.
Chung-Hsien KuoHan-Pang HuangPublished in: ICRA (2000)
Keyphrases
- petri net
- colored petri nets
- stochastic petri net
- petri net model
- manufacturing systems
- discrete event systems
- distributed systems
- high level petri nets
- concurrent processes
- service composition
- ims ld
- sequence diagrams
- fuzzy petri net
- concurrent systems
- artificial intelligence
- reactive systems
- process model
- temporal logic
- model checking