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Influence of substrate thickness on thermal impedance of microelectronic structures.

Bjorn VermeerschGilbert De Mey
Published in: Microelectron. Reliab. (2007)
Keyphrases
  • infrared
  • film thickness
  • database
  • data sets
  • neural network
  • thin film
  • electrical properties
  • data mining
  • power plant
  • social influence
  • cross section