Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method.
Euan RamsayK. A. SerrelsM. J. ThomsonAndrew J. WaddieR. J. WarburtonMohammed R. TaghizadehDerryck Telford ReidPublished in: Microelectron. Reliab. (2007)