Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment.
Janet L. MurdockBarbara Hayes-RothPublished in: IEEE Expert (1991)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- intelligent control
- control system
- monitoring system
- data acquisition
- situational awareness
- real time
- decision support
- control method
- discrete event
- information retrieval
- industrial systems
- intelligent systems
- human operators
- control problems
- control theory
- control strategy
- production system
- state space
- reinforcement learning
- genetic algorithm