Integrated Temperature Sensors for On-Line Thermal Monitoring of Microelectronic Structures.

Karim Arabi Bozena Kaminska

Published in: J. Electron. Test. (1998)

Keyphrases

monitoring system
infrared
real time
decision support
case study
search algorithm
social networks
decision making
probabilistic model
thin film
health monitoring
visible spectrum
room temperature
tool wear