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Direct measurements of anchor damping in MEMS resonators.

Janna RodriguezDustin D. GerrardGrant M. GlazeSaurabh ChandorkarLizmarie ComeneciaYunhan ChenIan B. FladerThomas W. Kenny
Published in: IEEE SENSORS (2017)
Keyphrases
  • power system
  • measurement noise
  • special case
  • dynamic model
  • data sets
  • similarity measure
  • control strategy
  • operating conditions
  • optimal design
  • surface roughness