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Identifying ill tool combinations via Gibbs sampler for semiconductor manufacturing yield diagnosis.

Yu-Chin HsuRong-Huei ChenChih-Ming Fan
Published in: WSC (2012)
Keyphrases
  • semiconductor manufacturing
  • gibbs sampler
  • random fields
  • process control
  • markov chain
  • production system
  • bayesian inference
  • gibbs sampling
  • higher order
  • markov random field
  • graphical models