Fabrication of MEMS Resonators in Thin SOI

Daniel Grogg Nicoleta Diana Badila-Ciressan Adrian Mihai Ionescu

Published in: CoRR (2008)

Keyphrases

silicon on insulator
high density
integrated circuit
high speed
cmos technology
ibm power processor
neural network
hidden markov models
low cost
information systems
high quality
preprocessing
magnetic recording