A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication.

Ge Yang James A. Gaines Bradley J. Nelson

Published in: J. Intell. Robotic Syst. (2003)

Keyphrases

integrated circuit
high density
control system
knowledge base
image processing
semiconductor manufacturing
data mining
three dimensional
high level
learning environment
information technology
special case
higher level
lower level
levels of abstraction