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integrated capacitive vibration sensor with sub-10 zF/rt-Hz noise floor.

Sitaraman V. IyerHasnain LakdawalaRajarishi S. SinhaEric J. ZacherlRichard T. UnetichDaniel M. GaugelDavid F. GuillouL. Richard Carley
Published in: CICC (2005)
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