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Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively Coupled Plasma Etcher.

Tietun SunJianmin MiaoHong ZhuCiprian IliescuJianbo Sun
Published in: Int. J. Comput. Eng. Sci. (2003)
Keyphrases
  • real world
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  • structured light
  • plasma etching