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A Modular Switched-Capacitor Chip-Stacking Drive Platform for kV-Level Electrostatic Actuators.

Yanqiao LiBahlakoana MabethaJason T. Stauth
Published in: IEEE J. Solid State Circuits (2023)
Keyphrases
  • transmission line
  • low cost
  • control system
  • real time
  • decision trees
  • degrees of freedom
  • data sets
  • high density
  • levels of abstraction