Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes.
Dongsheng LiHanyong DongZihao XieMengjiao QuQian ZhangJin XiePublished in: NEMS (2021)
Keyphrases
- high resolution
- imaging sensors
- low resolution
- data acquisition
- laser scanner
- sensor data
- super resolution
- image processing
- sensor networks
- high frequency
- monitoring system
- sensor fusion
- remote sensing
- energy consumption
- real time
- time of flight
- magnetic resonance images
- high quality
- multi sensor
- computer mediated
- image sensor
- computer conferencing
- sonar images