C-Axis Textured, 2-3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications.
Asaf CohenHagai CohenSidney R. CohenSergey KhodorovYishay FeldmanAnna KossoyIfat Kaplan-AshiriAnatoly I. FrenkelEllen WachtelIgor LubomirskyDavid EhrePublished in: Sensors (2022)