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Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control.

Frank BoerenAlexander LanzonTom Oomen
Published in: IEEE Trans. Control. Syst. Technol. (2020)
Keyphrases
  • motion control
  • control system
  • robot control
  • mobile robot
  • physical constraints
  • computer vision
  • autonomous navigation
  • process control