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K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability.

Anna PersanoAugusto TazzoliPaola FarinelliGaudenzio MeneghessoPietro SicilianoFabio Quaranta
Published in: Microelectron. Reliab. (2012)
Keyphrases
  • case study
  • data sets
  • artificial intelligence
  • multiscale
  • artificial neural networks
  • evolutionary algorithm
  • markov chain
  • knowledge based systems
  • building blocks
  • design decisions