A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM.
Jialin ShiLianqing LiuPeng YuYang CongPublished in: IROS (2016)
Keyphrases
- closed loop
- open loop
- control system
- feedback control
- control law
- controller design
- control loop
- guaranteed cost
- disturbance rejection
- control scheme
- control theory
- trajectory tracking
- intelligent control
- induction motor
- reference trajectory
- nonlinear systems
- optimal control
- force control
- visual servoing
- feedback controller
- control parameters
- pid controller