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Wafer-scale nanostructure formation inside vertical nano-pores.
J. W. Berenschot
X. Sun
Hai Le The
R. M. Tiggelaar
M. J. de Boer
J. C. T. Eijkel
J. G. E. Gardeniers
Niels R. Tas
Edin Sarajlic
Published in:
NEMS (2017)
Keyphrases
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nano scale
scale space
integrated circuit
real time
database
expert systems
medical images
small scale
artificial intelligence
information systems
metadata
web services
multi agent
special case
manufacturing process