High-performance PIN photodiodes on TMAH thinned silicon wafers.

Gian-Franco Dalla Betta S. Ronchin A. Zoboli Nicola Zorzi

Published in: Microelectron. J. (2008)

Keyphrases

integrated circuit
high density
low cost
semiconductor manufacturing
high speed
scientific computing
data sets
database
color images
cost effective
high efficiency
thinning algorithm
high reliability