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Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application.

Zhibo MaYinan WangQiang ShenHan ZhangXuetao Guo
Published in: Sensors (2018)
Keyphrases
  • key technologies
  • high density
  • high speed
  • rapid development
  • case study
  • decision support
  • steady state
  • cost effective
  • precision agriculture