Triangle-based process hotspot classification with dummification in EUVL.
Po-Hsun WuChe-Wen ChenChi-Ruo WuTsung-Yi HoPublished in: VLSI-DAT (2014)
Keyphrases
- classification process
- decision trees
- machine learning
- pattern recognition
- classification method
- classification accuracy
- data mining
- process model
- text classification
- image classification
- feature set
- support vector machine
- supervised learning
- class labels
- image processing
- classification algorithm
- knowledge base
- development process
- automatic classification
- classification scheme
- data sets
- recognition process