Login / Signup
Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification.
Chi-Yuan Liu
Hui-Ju Katherine Chiang
Yao-Wen Chang
Jie-Hong R. Jiang
Published in:
DAC (2014)
Keyphrases
</>
control system
data sets
machine learning
data acquisition
control strategy
control method
control strategies
artificial intelligence
cooperative
shape variations
control problems