Material removal rate prediction in chemical mechanical planarization with conditional probabilistic autoencoder and stacking ensemble learning.
Yupeng WeiDazhong WuPublished in: J. Intell. Manuf. (2024)
Keyphrases
- ensemble learning
- ensemble classifier
- ensemble methods
- prediction accuracy
- generalization ability
- base classifiers
- weak learners
- multiple classifiers
- probabilistic model
- random forest
- prediction model
- feature selection
- mutual subspace method
- concept drift
- bp neural network
- bayesian networks
- support vector machine svm
- decision trees