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Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator.

Giovanni NiroIlaria MarascoFrancesco RizziAntonella D'OrazioMarco GrandeMassimo de Vittorio
Published in: Sensors (2023)
Keyphrases
  • thin film
  • high density
  • database
  • design process
  • multi layer