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Reduction of the temperature sensitivity of anodic bonded resonant pressure micro sensors.
Yulan Lu
Bo Xie
Lin Zhu
Qiuxu Wei
Chaochao He
Chao Xiang
Junbo Wang
Deyong Chen
Jian Chen
Published in:
NEMS (2017)
Keyphrases
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sensor networks
real time
sensitivity analysis
sensor technology
multi sensor
high sensitivity
sensor data
data fusion
data acquisition
reduction method
flow rate
high temperature
room temperature
environmental factors
sensor readings
case study
learning algorithm
genetic algorithm