High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes.
Xuying ChenXinxin LiuTao WangXianhao LeZhonggui XuChengkuo LeeJin XiePublished in: NEMS (2018)
Keyphrases
- high quality
- low quality
- ground truth
- thin film
- integrated circuit
- high density
- higher quality
- numerical solution
- decision trees
- factor analysis
- elastic matching
- image sequences
- evolutionary algorithm
- magnetic recording
- data sets
- artificial neural networks
- expert systems
- data structure
- three dimensional
- image processing
- information systems
- genetic algorithm