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Investigating the piezoelectric response of Mg-Ti-doped-AlN thin films for sensor application.

S. A. AnggrainiM. UeharaH. YamadaM. Akiyama
Published in: IEEE SENSORS (2017)
Keyphrases
  • thin film
  • room temperature
  • viewpoint
  • sensor networks
  • real time
  • databases
  • wireless sensor networks
  • learning experience
  • multi layer
  • high density
  • short circuit