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A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints.
Jipeng Wang
Chunrong Pan
Hesuan Hu
Liang Li
Yuan Zhou
Published in:
IEEE Trans Autom. Sci. Eng. (2019)
Keyphrases
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cyclic scheduling
clustering algorithm
constraint satisfaction
software tools
semiconductor manufacturing
end users
data clustering
multiple types