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A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints.

Jipeng WangChunrong PanHesuan HuLiang LiYuan Zhou
Published in: IEEE Trans Autom. Sci. Eng. (2019)
Keyphrases
  • cyclic scheduling
  • clustering algorithm
  • constraint satisfaction
  • software tools
  • semiconductor manufacturing
  • end users
  • data clustering
  • multiple types