Enhancements of Model and Method in Lithography Hotspot Identification.
Xuanyu HuangRui ZhangYu HuangPeiyao WangMei LiPublished in: DATE (2021)
Keyphrases
- mathematical model
- cost function
- probabilistic model
- theoretical analysis
- prediction model
- statistical model
- input data
- objective function
- modeling method
- reconstruction method
- prior knowledge
- markov model
- classification method
- detection method
- high order
- similarity measure
- prior information
- evaluation method
- monte carlo simulation
- test data
- study proposes
- analytical model
- preprocessing
- significant improvement
- energy function
- artificial neural networks
- em algorithm
- hybrid model
- linear model
- network model
- bp neural network
- linear regression
- parameter estimation
- optimization method
- gaussian distribution
- support vector machine svm
- segmentation algorithm
- model selection
- parameter space
- evaluation model
- clustering method
- pairwise
- classification algorithm