Simulation and optical measurement of MEMS thermal actuator sub-micron displacements in air and water.

Bruno Barazani Stephan Warnat Ted Hubbard

Published in: CCECE (2015)

Keyphrases

electron beam
simulation model
control system
finite element model
injection lasers
air temperature
flow velocity
motion estimation
simulation models
infrared
closed loop
boundary conditions
finite element analysis