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Control-oriented plasma modeling and controller design for reactive sputtering.
Christian Woelfel
Moritz Oberberg
Birk Berger
Dennis Engel
Ralf Peter Brinkmann
Julian Schulze
Peter Awakowicz
Jan Lunze
Published in:
IFAC J. Syst. Control. (2021)
Keyphrases
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controller design
control system
nonlinear systems
control strategies
takagi sugeno
control scheme
control strategy
reduced order model
feedback controller
computer simulation
control method
control law
fuzzy control
fuzzy logic controller
optimization algorithm
dynamic programming
learning algorithm